Title:
MANUFACTURING METHOD FOR CERAMIC GREEN SHEET ON WHICH PATTERN IS FORMED
Document Type and Number:
Japanese Patent JP3885285
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To improve yield, with easy wiring design, and to form a fine pattern which is difficult to achieve with screen printing method by, after forming a pattern of specific surface roughness with a light-sensitive conductive paste on a film, it is transferred to a ceramic green sheet.
SOLUTION: A light-sensitive paste is applied to a polyester film with mold- release treatment, and after mask-exposure with a photo-make with photolithography, development is performed in the developer. The surface condition of a pattern thus obtained is made to be Ra≤3μm at surface roughness test. Then a transfer film which was pattern-formed is transferred to a ceramic green sheet. Then pattern-formed green sheets are laminated, to manufacture a ceramics multi-layer substrate. Lastly, the multi-layer substrate is sintered in a furnace, so that a ceramic multi-layer substrate where such pattern as a conductor is formed at a via hole is obtained.
Inventors:
Keiji Iwanaga
Tomohiko Ogata
Takaki Masaki
Akiko Yoshimura
Tomohiko Ogata
Takaki Masaki
Akiko Yoshimura
Application Number:
JP14151397A
Publication Date:
February 21, 2007
Filing Date:
May 30, 1997
Export Citation:
Assignee:
TORAY INDUSTRIES,INC.
International Classes:
H05K1/09; H05K3/20; C04B41/51; C04B41/88; (IPC1-7): H05K3/20; C04B41/88; H05K1/09
Domestic Patent References:
| JP7122839A | ||||
| JP5275818A |