Title:
MANUFACTURING METHOD OF CIRCUIT BOARD AND ITS DEVICE
Document Type and Number:
Japanese Patent JP3927780
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To accurately detect feeble minute-particle scattering light acquired from detection of microscopic particles suspended in a treating chamber.
SOLUTION: When applying desired membrane formation/processing treatment to a body to be treated in the treating chamber, the inside of the treating chamber is irradiated with a beam subjected to P-polarization and intensity modulation by the frequency of an excitation source and the frequency different from its integer-fold frequencies through an observation window having inclination forming a Brewster angle to a P-polarized input beam. Backward scattered light scattered by the microscopic particles in the treating chamber is received and imaged by a detection optical system through the same observation window, and a frequency component and a wavelength component of the beam subjected to the intensity modulation are detected from inside the received light signal. The number, the size and the distribution of the microscopic particles are discriminated by using the detected components and the imaged image information.
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Inventors:
Hiroyuki Nakano
Toshihiko Nakata
Masayoshi Serizawa
Toshihiko Nakata
Masayoshi Serizawa
Application Number:
JP2001217511A
Publication Date:
June 13, 2007
Filing Date:
July 18, 2001
Export Citation:
Assignee:
Renesas Technology Corp.
International Classes:
C23C16/52; H01L21/302; G01N15/02; H01L21/3065; (IPC1-7): G01N15/02; H01L21/3065; //C23C16/52
Domestic Patent References:
| JP11330053A | ||||
| JP2000208448A |
Attorney, Agent or Firm:
Yamato Tsutsui
Yasuo Sakuta
Yasuo Sakuta