To provide a manufacturing method of a cold cathode image device capable of enhancing an alignment property of carbon nanotube formed in a fine hole having a high aspect ratio.
A structure composed of a cathode electrode 2, an insulating film 3 formed on the cathode electrode 2 to have a hole 6a, a gate electrode 2 formed on the insulating film 3 to have the hole 6b and a carbon nanotube 7a formed on the bottom part of a hole 6b to be electrically connected to the cathode electrode 2, is manufactured by the manufacturing method of cold cathode image display device. An adhesive material 21 is adhered to carbon nanotubes 7a by pressing a substrate 20 toward a substrate 10 in a state that a main surface 10a of the substrate 10 and a main surface 20a of the substrate 20 face each other. A protrusion part 21a is formed by compressing and deforming the adhesive material 21 when adhering the the adhesive material 21 to the carbon nanotubes 7a, and the protrusion part is inserted into a hole 6.
COPYRIGHT: (C)2006,JPO&NCIPI
Masahiro Fujikawa
Shuhei Nakata
Tomohide Shen
Toshio Kobayashi
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Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Hisato Noda
Masayuki Sakai