Title:
被覆部材の製造方法
Document Type and Number:
Japanese Patent JP6996522
Kind Code:
B2
Abstract:
To provide a novel method of manufacturing a coated member coated with a conductive carbon film.SOLUTION: The present invention relates to a method of manufacturing a coated member having its surface coated with a conductive carbon film, and the method comprises a film deposition process of depositing the conductive carbon film through chemical vapor deposition using plasma generated by a dielectric barrier discharge. The dielectric barrier discharge is generated preferably under a condition that a discharge index value (Vp/P d) found by dividing a peak value (Vp/kV) of a voltage applied to an electrode by a discharge distance (d/mm) as a distance from a dielectric surface to the member surface and gas pressure (P/kPa) of a discharge atmosphere is equal to or larger than 0.04(V/Pa mm). Further, the chemical vapor deposition is carried out preferably by heating the member to 400°C or higher while a raw material gas including at least a nitrogen gas and a hydrocarbon gas is supplied. The present invention provides film deposition in an atmosphere close to atmospheric pressure, and greatly reduces manufacturing costs for the coated member.SELECTED DRAWING: Figure 2
Inventors:
Kazuyuki Nakanishi
Yasuhiro Ozawa
Riichiro Ota
Takanori Yamamoto
Yasuhiro Ozawa
Riichiro Ota
Takanori Yamamoto
Application Number:
JP2019039889A
Publication Date:
January 17, 2022
Filing Date:
March 05, 2019
Export Citation:
Assignee:
Toyota Central R & D Labs.
International Classes:
C23C16/503; C01B32/205; C23C16/26; H05H1/24
Domestic Patent References:
| JP2007207718A | ||||
| JP11012735A | ||||
| JP2010126734A |
Attorney, Agent or Firm:
Masayuki Morioka
Sansui International Patent Office
Sansui International Patent Office