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Patent Searching and Data


Title:
MANUFACTURING METHOD AND DEVICE FOR ORGANIC EL ELEMENT
Document Type and Number:
Japanese Patent JP2004103512
Kind Code:
A
Abstract:

To carry out cleaning of the vapor deposition mask efficiently and without deforming in the manufacture of an organic EL element.

The vapor deposition mask is scanned by focusing energy beam in the film forming chamber which carries out the vapor deposition of the organic EL element, and by carrying out local heating, the deposit accumulated on the vapor deposition mask is sublimated and removed.


Inventors:
IIJIMA MAKOTO
Application Number:
JP2002267125A
Publication Date:
April 02, 2004
Filing Date:
September 12, 2002
Export Citation:
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Assignee:
FUJITSU LTD
International Classes:
C23C14/00; C23C14/12; C23C14/24; H01L51/50; H05B33/14; H05B33/10; (IPC1-7): H05B33/10; C23C14/00; C23C14/12; C23C14/24; H05B33/14
Attorney, Agent or Firm:
Tadahiko Ito