MANUFACTURING METHOD FOR DEVICE

Title:

MANUFACTURING METHOD FOR DEVICE

Document Type and Number:

Japanese Patent JP2004119120

Kind Code:

A

Abstract:

To provide a manufacturing method suitable for a device to fix a bar-shaped member on a substrate.

This manufacturing method for the device has the substrate and the bar-shaped member fixed to the substrate while having a longitudinal direction parallel to the inner surface direction of the substrate. It has a process to fix a plurality of mutually separated spots of the bar-shaped member to the substrate; a process to form a space between the substrate and the bar-shaped member in a region sandwiched between two adjacent spots among the plurality of the spots or a process to widen the space between the substrate and the bar-shaped member; and a process to spray a fluid onto the substrate or a process to clean the substrate, with the space formed.

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Inventors:

SUZUKI NORIHIRO

Application Number:

JP2002279182A

Publication Date:

April 15, 2004

Filing Date:

September 25, 2002

Export Citation:

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Assignee:

CANON KK

International Classes:

H01J9/38; (IPC1-7): H01J9/38

Attorney, Agent or Firm:

Nobuyuki Kaneda
Katsuhiro Ito
Ishibashi Masayuki

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