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Patent Searching and Data


Title:
MANUFACTURING METHOD OF DISPLAY MEMBER
Document Type and Number:
Japanese Patent JP2007094267
Kind Code:
A
Abstract:

To provide the manufacturing method of a display member by which a pattern and a product obtained by a photo lithographic method can be manufactured at high yield, and to provide a display.

The manufacturing method of the display member by which the pattern is formed on a substrate in a step for applying and drying a photosensitive paste, a step for exposing an obtained coating film and a step for developing the exposed coating film includes, directly after the step for exposing the coating film, a step for exposing a substrate on which a photosensitive layer which is colored by an active ray is formed by using the active ray via a photo mask and transferring a defect on the photo mask to the photosensitive layer on the substrate as a pattern to inspect the defect on the photo mask.


Inventors:
TSUJI YOSHIYUKI
IGUCHI YUICHIRO
Application Number:
JP2005286335A
Publication Date:
April 12, 2007
Filing Date:
September 30, 2005
Export Citation:
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Assignee:
TORAY INDUSTRIES
International Classes:
G03F1/84