下向型MEMSスイッチの製造方法及び下向型MEMSスイッチ

Title:

下向型MEMSスイッチの製造方法及び下向型MEMSスイッチ

Document Type and Number:

Japanese Patent JP4402682

Kind Code:

B2

Abstract:

A downward type micro electro mechanical system (EMS) switch and a method of fabricating the same is provided. The downward type MEMS switch includes first and second cavities formed in a substrate, first and second actuators formed on upper portions of the first and second cavities, first and second fixing lines formed on an upper surface of the substrate and not overlapped with the first and second cavities, and a contact pad which is spaced apart at a predetermined distance from surfaces of the first fixing line and the second fixing line but which can be contacted with the first fixing line and the second fixing line when the first actuator and the second actuator are driven. The contact pad, which is actuated downward by piezoelectricity, is fabricated as it shares a layer with a RF signal line, after the RF signal line is fabricated.

Inventors:

Zhao Sang-an
Golden bell
Song Tora
Lee Sou
Kim Dong
Choi Aki
Hong Eizawa
Gold

Application Number:

JP2006332332A

Publication Date:

January 20, 2010

Filing Date:

December 08, 2006

Export Citation:

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