To provide a manufacturing method of an electron beam source, capable of obtaining the electron beam source having high electron emitting efficiency and a long lifetime.

A wire 59P made of an alloy containing tantalum is wound around a base material 58P made of an alloy containing tungsten so that the base material 58P is covered with it to form a composite structure 53P. carbonizing treatment is applied to the wire 59P of the composite structure 53P to form the base material 58P as a power supply member 58 and form the wire 58P as an electron emitting member 59. Thereby, the wire 59P containing carbonized tantalum can be provided so as to be wound around the base material 58P. That is, the wire 59P containing carbonized tantalum having a small work function can be stably fixed to the base material 58P having resistance to high temperatures and containing tungsten.