To provide the manufacturing method of an electron-emitting element having an emitter with uniform electron-emitting sources and superior reliability.
The manufacturing method of the electron-emitting element has a step of constituting a catalytic-containing film 102, containing a catalytic material to advance constitution of a graphite structure on a substrate 21 and forming a carbon structure 104, in a direction normal to the substrate 21 so as to be appropriately dispersed on the catalytic-containing film 102. The carbon structure 104 is changed to the graphite structure to constitute a carbon nanotube 101, by heating the substrate 21 to move a catalytic particle 105 within the carbon structure 104. Accordingly, the electron-emitting element is manufactured with an emitter 23, constituted from the carbon nanotube 101, oriented substantially in a direction normal to the substrate 21 and disposed at an even density.
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OKAWA TETSUYA
NEC LIGHTING LTD