To provide a manufacturing method of an electron source, whereby processes are simplified.
A plurality of units each of which is composed of a pair of electrodes 2, 3 and a high polymer film 4' to connect the pair of electrodes 2, 3, a wiring 7 in the X direction and a wiring 8 in the Y direction to connect a plurality of the units are formed on an electron source substrate 10, and a part of the electron source substrate 10 is covered with a vacuum vessel 12. Thereby, a plurality of the units are disposed in a space formed by the first substrate and the vessel. A desired atmosphere is created in the space, the resistance of the high polymer film composing each of a plurality of the units positioned in the space is reduced, and a gap 6' is formed in each film obtained by reducing the resistance of the high polymer film 4'.
IWAKI TAKASHI
Yoshiyuki Kawaguchi
Mayuko Wakuda
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