Title:
Manufacturing method of electronic device
Document Type and Number:
Japanese Patent JP6296701
Kind Code:
B2
Abstract:
When a thin film is formed by an application method, damage to a substrate or existing electrodes and functional layers can be reduce. A method for manufacturing an electronic device comprising two or more electrodes, and an organic thin film provided between the two or more electrodes, the method comprising the steps of: forming a coating film by applying a coating liquid that comprises a material having a crosslinking group, and forming the organic thin film by repeating an irradiation of electromagnetic waves to the coating film to cross-link with the crosslinking group.
Inventors:
Yuichi Rokuhara
Shuichi Sasa
Shuichi Sasa
Application Number:
JP2013115339A
Publication Date:
March 20, 2018
Filing Date:
May 31, 2013
Export Citation:
Assignee:
Sumitomo Chemical Co., Ltd.
International Classes:
H05B33/10; C08J3/28; C09D201/00; H01L21/336; H01L29/786; H01L31/04; H01L51/05; H01L51/40; H01L51/50
Domestic Patent References:
| JP2009129603A | ||||
| JP2009252944A | ||||
| JP2010505619A | ||||
| JP2012129229A | ||||
| JP2008273148A | ||||
| JP2012174489A | ||||
| JP2004102114A |
Foreign References:
| WO2009107497A1 | ||||
| WO2007060837A1 | ||||
| US20100133515 | ||||
| US20070193978 |
Attorney, Agent or Firm:
Hiroaki Sakai