To provide a manufacturing method of an emitter for a field emission element that never produces a step on a substrate in manufacturing the emitter by erecting a part of a thin emitter material layer, and thereby capable of providing a high-reliability field emission element.
A sacrifice layer hill 20 with at least a part of a circumferential side surface formed into a slope 21 is formed in a local part of a substrate 10. An emitter material layer 30 is formed on the substrate 10 and the sacrifice layer hill 20. By patterning the emitter material layer 30, emitter constituting patterns 32 each having an electron emission end 31 at a tip are formed on parts riding on the slope 21 of the sacrifice layer hill 20. Cantilever structures with the electron emission ends 31 of the emitter constituting patterns 32 lifted from the substrate 10 are made by removing the sacrifice layer hill 20. The emitters are formed by erecting the cantilever structures in a direction vertical to the substrate.
YOSHIDA TOMOYA
KANAMARU MASATAKE
| JPH1012123A | 1998-01-16 | |||
| JPH08273522A | 1996-10-18 | |||
| JP2003229046A | 2003-08-15 | |||
| JPH11162327A | 1999-06-18 |
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