Title:
フィルタ装置及び露光システム並びにデバイスの製造方法
Document Type and Number:
Japanese Patent JP4816080
Kind Code:
B2
Abstract:
A filter apparatus for improving gas temperature stability while maintaining a high impurity removal capacity. The filter apparatus includes a filter for removing impurities from a gas and a temperature adjuster for adjusting the temperature of the gas to a predetermined temperature. The filter apparatus further includes a humidity detector, arranged at the upstream side of the filter, for adjusting the humidity of the gas before the gas passes through the filter.
More Like This:
| WO/2010/108328 | REJUVENATED FOAM SUPPORT FILTER |
| JP2001002042 | CONTAINER, AND ADSORPTION APPARATUS USING THE SAME |
Inventors:
Kenji Udagawa
Yoshitomo Nagahashi
Yoshitomo Nagahashi
Application Number:
JP2005506764A
Publication Date:
November 16, 2011
Filing Date:
June 02, 2004
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
B01D53/04; B01D46/00; B01D46/42; B01D51/00; G03F7/20; H01L21/027
Domestic Patent References:
| JP2000317238A | 2000-11-21 | |||
| JP2001046822A | 2001-02-20 | |||
| JP2000015020A | 2000-01-18 | |||
| JP2002153719A | 2002-05-28 |
Attorney, Agent or Firm:
Hironobu Onda
Makoto Onda
Makoto Onda