Title:
MANUFACTURING METHOD OF FLOW SENSOR
Document Type and Number:
Japanese Patent JP3686398
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a manufacturing method of a flow sensor capable of manufacturing easily and reducing a manufacturing cost.
SOLUTION: A plurality of passage recessed parts 7 are formed on the back of a stainless substrate material 50 having the mirror-finished surface side, remaining slight film thickness on the surface side. An electric insulating film 13 is formed on the surface of the substrate material 50, and a flow velocity detection means 12 or the like is formed thereon by a well-known membrane formation technology. The substrate material 50 is cut and separated at the center of a thick part 50B, to thereby form a plurality of sensor chips 51. The sensor chips 51 and a stainless passage formation member 2 are laminated and subjected to laser welding.
Inventors:
Shinichi Ike
Nobuhiko
Koji Sui
Shoji Kamiunten
Nobuhiko
Koji Sui
Shoji Kamiunten
Application Number:
JP2002243589A
Publication Date:
August 24, 2005
Filing Date:
August 23, 2002
Export Citation:
Assignee:
YAMATAKE CORPORATION
International Classes:
G01F1/692; (IPC1-7): G01F1/692
Domestic Patent References:
| JP7159215A | ||||
| JP5264564A | ||||
| JP2001336958A | ||||
| JP10160538A |
Foreign References:
| WO2001084088A1 |
Attorney, Agent or Firm:
Masaki Yamakawa