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Title:
MANUFACTURING METHOD OF FLUID CONTROL DEVICE
Document Type and Number:
Japanese Patent JP2018040355
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To solve problems on occurrence of error between a substrate and a piezoelectric actuator in assembling elements, and degradation of efficiency in transporting a fluid and generation of noise due to difficulty in maintaining a distance of a clearance, in a fluid control device.SOLUTION: A manufacturing method includes a step (a) for providing a casing 26, a piezoelectric actuator 23 composed of a piezoelectric element 233 and a vibration plate 230 having a first surface 230b and a second surface 230a corresponded to the first surface, and a deformable substrate structure including a circulation plate 21, and a flexible plate 22 having a movable portion, a step (b) for providing a synchronous deformation structure of the flexible plate and the circulation plate by joining the flexible plate and the circulation plate of the deformable substrate structure in a stacked manner, and a step (c) for successively stacking the casing, the piezoelectric actuator and the deformable substrate structure and defining a specific depth between the movable portion and a bulge portion.SELECTED DRAWING: Figure 3A

Inventors:
HAN YUNG-LUNG
HUANG CHI-FENG
Application Number:
JP2017168150A
Publication Date:
March 15, 2018
Filing Date:
September 01, 2017
Export Citation:
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Assignee:
MICROJET TECHNOLOGY CO LTD
International Classes:
F04B43/04; B81C3/00; F04B45/047; H01L41/053; H01L41/09; H01L41/23; H01L41/31
Domestic Patent References:
JP2013057247A2013-03-28
Foreign References:
WO2013187271A12013-12-19
WO2013054801A12013-04-18
Attorney, Agent or Firm:
新保 斉