Title:
機能性膜素子の製造方法
Document Type and Number:
Japanese Patent JP3592023
Kind Code:
B2
Abstract:
When green sheets are laminated and integrally fired for a window spacer plate 26 formed with at least a plurality of windows 29, a covering plate 25 for covering the windows 29, and a through hole plate 27 having through holes, 22, 23, communicating with the windows 29, it is arranged to make a ratio t/w of thickness t of the window spacer place 26 to length w of the through holes, 22, 23 in its minor axis direction one or more, and to form a functional film actuator 33 on the outer surface of the covering plate 25 after firing. A gap (separation) is prevented from being generated in the interface between each ceramics plate in producing a ceramics substrate used for the functional film element.
Inventors:
Nobuo Takahashi
Tsutomu Nanataki
Tsutomu Nanataki
Application Number:
JP4925097A
Publication Date:
November 24, 2004
Filing Date:
March 04, 1997
Export Citation:
Assignee:
Nippon Insulator Co., Ltd.
International Classes:
G01L7/00; G01D21/00; H01L35/14; H01L41/08; H01L41/09; (IPC1-7): G01D21/00; G01L7/00; H01L35/14; H01L41/08
Domestic Patent References:
| JP6218929A | ||||
| JP6114550A | ||||
| JP8238763A |
Attorney, Agent or Firm:
Ippei Watanabe