To provide a manufacturing method of a functional monomolecular film capable of perfectly removing a compound not fixed on a substrate.
The manufacturing method of a functional monomolecular film includes at least a process for bringing a compound, which has the functional group fixed to the surface of the substrate 1 through a covalent bond and a functional group for developing a function, into contact with a substrate 1 to fix the same to the substrate 1 and a process for heating the compound, which is not fixed to the substrate 1, under an atmosphere 4 of 200°C for 10 min to evaporate it. By this method, the water repellent monomolecular film, which can perfectly remove the compound not fixed to the substrate 1 and has functional groups exposed to its surface, can be manufactured and the capacity of the functional monomolecular film can be enhanced.
TSURUTA KUNIHIRO
SASABE SHIGERU
Tomoyasu Sakaguchi
Hiroki Naito