Title:
MANUFACTURING METHOD OF GLASS PANE FOR IMPRINT MOLD
Document Type and Number:
Japanese Patent JP2017050528
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a manufacturing method of a glass pane for imprint mold which suppresses generation of recessed defects in a formation region of an uneven pattern.SOLUTION: A manufacturing method of the glass pane for imprint mold includes: a protruding face forming step for forming a protruding face which is surrounded by a step and protrudes from the surroundings, in a central part of a first principal surface of the glass pane by digging an outer peripheral part of the first principal surface; and a non-penetration hole forming step for forming a non-penetration hole in a central part of a second principal surface of the glass pane. The non-penetration hole forming step includes a processing step for processing the glass pane while supporting the first principal surface of the glass pane by a support surface of a processing table. The processing table includes an anti-flaw hole on the support surface. In the processing step, a formation region of the protruding face is arranged inside of an opening edge of the anti-flaw hole on the support surface in a planar view.SELECTED DRAWING: Figure 9
Inventors:
KUMAGAI HIROHIKO
NAKAMURA HIROTO
OTA SEIGO
ABE SHUHEI
ITO MASABUMI
MIYAMOTO NAOAKI
NAKAMURA HIROTO
OTA SEIGO
ABE SHUHEI
ITO MASABUMI
MIYAMOTO NAOAKI
Application Number:
JP2016120223A
Publication Date:
March 09, 2017
Filing Date:
June 16, 2016
Export Citation:
Assignee:
ASAHI GLASS CO LTD
International Classes:
H01L21/027; B29C33/38; B29C59/02; C03C15/00; C03C19/00; G11B5/84
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito
Previous Patent: Perpendicular division of a three-dimensional storage device
Next Patent: Dry etching method
Next Patent: Dry etching method