Title:
MANUFACTURING METHOD OF GLASS SUBSTRATE FOR MAGNETIC DISK
Document Type and Number:
Japanese Patent JP2015064920
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To maintain quality of a glass substrate while satisfying a surface roughness required in a polishing process.SOLUTION: In a manufacturing method of a glass substrate for a magnetic disk, a polishing device includes a carrier for holding the glass substrate and a surface table on which a polishing pad is stuck while facing a principal surface of the glass substrate held by the carrier. The manufacturing method of the glass substrate for the magnetic disk includes a polishing process in which a polishing liquid containing abrasive grains is supplied between the principal surface of the glass substrate held by the carrier and the polishing pad, and the glass substrate and the polishing pad are relatively moved so as to polish the principal surface of the glass substrate. After completion of the polishing, the polishing pad is removed from the principal surface of the glass substrate while relatively moving the carrier and the surface table on a plane parallel to the principal surface of the glass substrate held by the carrier.
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Inventors:
SUGIHARA HIROYASU
CHO DAISUKE
CHO DAISUKE
Application Number:
JP2013198902A
Publication Date:
April 09, 2015
Filing Date:
September 25, 2013
Export Citation:
Assignee:
HOYA CORP
International Classes:
G11B5/84; B24B1/00; B24B7/24; B24B37/005; B24B37/08; C03C19/00
Attorney, Agent or Firm:
Global IP Tokyo Patent Business Corporation