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Title:
MANUFACTURING METHOD OF GREEN SHEET, GREEN SHEET AND SILICON NITRIDE CERAMIC SUBSTRATE
Document Type and Number:
Japanese Patent JP2009208981
Kind Code:
A
Abstract:

To improve the uniformity of a film thickness of a green sheet to become a silicon nitride ceramic, and also to appropriately perform the control of an orientation degree of particles and to easily manufacture a silicon nitride ceramic substrate having good characteristics.

A sheet-shaped form is maintained, as it is, in a raw sheet 14 even after a Mylar sheet 12 is wound up by a winding side roll 16 and a raw sheet is separated from the Mylar sheet 12 (separating step). The raw sheet 14 after the separating step passes a heating device 18 (heating step). The raw sheet 14 is heated again and a binder component contained in the heating device 18 is softened. A constant shape property is obtained by evaporating an organic solvent at the drying step in the raw sheet 14. The orientation of a -type silicon nitride particles progresses and a plane orientation degree in the silicon nitride ceramic substrate can be set at 0.4 by performing a rolling step at a softening temperature or above of the binder after that.


Inventors:
Kikuchi, Hiromi
Watanabe, Junichi
Kaga, Yoichiro
Application Number:
JP2008000051977
Publication Date:
September 17, 2009
Filing Date:
March 03, 2008
Export Citation:
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Assignee:
HITACHI METALS LTD
International Classes:
C04B35/584; B28B1/00; B28B1/30; B28B3/12; B28B11/00; C04B35/622; H01L23/12