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Patent Searching and Data


Title:
MANUFACTURING METHOD OF HARD THIN FILM
Document Type and Number:
Japanese Patent JP2009155670
Kind Code:
A
Abstract:

To provide a manufacturing method of a hard thin film by which a hard thin film having high adhesiveness can be formed and also film thicknesses can be differentiated partially in the hard thin film.

In the method of forming the hard thin film on the surface to be treated (sliding surface 1a) of a material to be treated (valve lifter 1) according to a PVD process, magnetic fields are locally generated on the surface to be treated by performing a pattern arrangement of permanent magnets 3 on the back surface 1b of the surface to be treated and, thereby, the film thickness of the hard thin film formed on the surface to be treated can be partially differentiated.


Inventors:
ARAYOSHI TAKATOSHI
FUWA YOSHIO
Application Number:
JP2007332424A
Publication Date:
July 16, 2009
Filing Date:
December 25, 2007
Export Citation:
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Assignee:
TOYOTA MOTOR CORP
International Classes:
C23C14/35; C10M103/02; C10M177/00; C23C14/06; C10N30/00; C10N40/02; C10N40/18; C10N70/00
Attorney, Agent or Firm:
Hiroshi Okawa