To provide a manufacturing process of a high purity high melting point metal powder which reduces impurities and a scattering of an amount of impurities contained after purification, and improves a recovery rate of a high purity metal powder, in a purification and spheroidization of a high melting point metal powder by a thermal plasma droplet refining process.
This process is a method to manufacture the high purity high melting point metal powder by putting a high melting point metal powder of an average particle diameter of Da into a thermal plasma flame, and it is a feature that the particle diameter of the high melting point metal powder which occupies 90% or more of the whole with a mass fraction is 0.8Da-1.2Da, and it is desirable that Da is 10-260 μm. Desirably the high melting point metal powder is any of W, Ta, Ru or Mo.
CHIWATA NOBUHIKO
KAMISAKA SHUJIRO
