Title:
インプリント装置および物品の製造方法
Document Type and Number:
Japanese Patent JP5769451
Kind Code:
B2
Abstract:
An imprint apparatus which brings a resin on a substrate into contact with a pattern surface of a mold and cures the resin, includes a substrate holder which holds the substrate, a mold holder which holds the mold with a mold holding surface, a driving mechanism which moves the substrate holder relative to the mold holder, and a controller which controls the driving mechanism such that the substrate holder moves relative to the mold holder while the substrate holder holds a cleaning member instead of the substrate, and the cleaning member is in contact with the mold holding surface, thereby cleaning the mold holding surface.
Inventors:
Kohei Wakabayashi
Application Number:
JP2011049604A
Publication Date:
August 26, 2015
Filing Date:
March 07, 2011
Export Citation:
Assignee:
Canon Inc
International Classes:
H01L21/027; B29C33/72; B29C59/02; G11B5/84
Domestic Patent References:
| JP7130638A | ||||
| JP2002127151A | ||||
| JP10335356A | ||||
| JP2011003616A | ||||
| JP1103430A | ||||
| JP2008515171A | ||||
| JP2003220371A | ||||
| JP2005202026A | ||||
| JP10098090A | ||||
| JP2004207399A | ||||
| JP2011000805A | ||||
| JP2008244441A | ||||
| JP2009141384A |
Foreign References:
| US20080145773 | ||||
| US20030213382 | ||||
| US20100314798 | ||||
| US20060162739 | ||||
| US20080289652 | ||||
| US20040130692 | ||||
| US20120073461 |
Attorney, Agent or Firm:
Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu