インプリント装置及び物品の製造方法

Japanese Patent JP6818523

B2

PROBLEM TO BE SOLVED: To provide an imprint device advantageous in alignment of a mold and a substrate.SOLUTION: There is provided an imprint device having: a stage which holds a substrate; a drive part which moves the stage; a measurement part which measures a relative position shift between the mold and the substrate; and a control part which controls movement of the stage. The control part performs a process for determining a first correction amount for a target position based on a measured value of the measurement part, and a process for determining a second correction amount for the target position based on the measured value of the measurement part or one of values which are smaller than a maximum value of the first correction amount corresponding to the measured value and also larger than a minimum value in at least a part of a period from time when a mold and an imprint material are brought into contact with each other to time when curing the imprint material is started, and then changes a correction amount used to determine a manipulated variable from the first correction amount to the second correction amount before time when the curing of the imprint material is started.SELECTED DRAWING: Figure 1

Ryo Nawada
Toshiya Asano
Koji Sato

JP2016224539A

January 20, 2021

November 17, 2016

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Canon Inc

H01L21/027; B29C59/02

JP2008244441A
JP2016063219A
JP2015204419A
JP2016002668A
JP57111707A
JP2002229602A
JP4148528A
JP2012212901A
JP2011077584A1

WO2008099795A2
US20160075076
US20150290871

Yasunori Otsuka
Yasuhiro Otsuka
Shiro Takayanagi
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu

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