Title:
MANUFACTURING METHOD OF INFRARED DETECTION ELEMENT
Document Type and Number:
Japanese Patent JP2011013224
Kind Code:
A
Abstract:
To provide a manufacturing method for an infrared two dimensional image sensor which is able to enhance the detection sensitivity, and which is easy to integrate.
On an infrared detection capacitance CF made of ferroelectric material film, a capacitance part 100 is supported by drawer wirings 102 and 104 and is held for a Si substrate, which is located both sides of a groove part 330. A lower electrode is combined with the drawer wiring 102, and an upper electrode is combined with the drawer wiring 104. The planar shape of the capacitance part 100 is formed into a shape, such that diagonally opposite parts 106, 108 are mutually removed from a rectangular shape.
More Like This:
| JPH0264426 | PYROELECTRIC NON-CONTACT THERMOMETER |
| JP3186603 | PYROELECTRIC INFRARED SENSOR ELEMENT |
Inventors:
HASHIMOTO KAZUHIKO
MUKOGAWA TOMONORI
KUBO RYUICHI
KISHIHARA HIROYUKI
NODA MINORU
OKUYAMA MASANORI
MUKOGAWA TOMONORI
KUBO RYUICHI
KISHIHARA HIROYUKI
NODA MINORU
OKUYAMA MASANORI
Application Number:
JP2010177760A
Publication Date:
January 20, 2011
Filing Date:
August 06, 2010
Export Citation:
Assignee:
HOCHIKI CO
OKUYAMA MASANORI
OKUYAMA MASANORI
International Classes:
G01J1/02; H01L27/14; H01L27/146; H01L37/00; H04N5/33; G01J1/42
Domestic Patent References:
| JPH0432274A | 1992-02-04 | |||
| JPH06194226A | 1994-07-15 | |||
| JPH08145799A | 1996-06-07 | |||
| JPH02205729A | 1990-08-15 | |||
| JPS62162369A | 1987-07-18 |
Attorney, Agent or Firm:
Kuro Fukami
Toshio Morita
Yutaka Horii
Masayuki Sakai
Toshio Morita
Yutaka Horii
Masayuki Sakai