Title:
赤外線検出装置の製造方法
Document Type and Number:
Japanese Patent JP6826484
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an infrared detection device capable of accurately recognizing an object spatially even when a low-cost condenser lens including an infrared detection part composed of infrared detection elements in a two-dimensional array for the purpose of space perception is used.SOLUTION: A cavity 14 corresponding to an infrared detection element 11 is formed by subjecting a semiconductor substrate (chip) 1 surface side to silicon anisotropic etching using alkali solution, and an infrared detection part including a plurality of infrared detection elements on the cavity 14 is formed from the surface side. A thermopile part is formed which outputs a thermal electromotive force generated by infrared detected by the infrared detection part. The semiconductor substrate 1 is thinned to the extent that each region on which the infrared detection element is formed is exposed through the cavity from the rear side. As infrared enters through the bottom of the opened cavity an absorption film of the element, the cavity itself only limits the infrared to the infrared entering the absorption film, and prevents the infrared diffusing in other directions from entering other elements.SELECTED DRAWING: Figure 1
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Inventors:
Kuniyuki Hishinuma
Application Number:
JP2017082366A
Publication Date:
February 03, 2021
Filing Date:
April 18, 2017
Export Citation:
Assignee:
Seiko npc Co., Ltd.
International Classes:
G01J1/02; H01L35/32
Domestic Patent References:
| JP2016017794A | ||||
| JP2011124506A | ||||
| JP9257564A | ||||
| JP61035320A | ||||
| JP2004037297A | ||||
| JP8330607A | ||||
| JP11112038A |
Foreign References:
| US20160163942 |
Attorney, Agent or Firm:
Field Saki Satoshi
Shingo Suzuki
Nishizawa Kazumi
Toshi Takemura
Shingo Suzuki
Nishizawa Kazumi
Toshi Takemura