To provide a manufacturing method in which a workpiece such as a small device can be machined by a laser beam with high accuracy and in which an adverse effect of the laser beam machining on the workpiece is minimized, and also to provide the laser beam machining method and apparatus.
The laser beam machining apparatus 40 includes: a laser irradiation device 50 for generating a laser beam and emitting it to a workpiece 44; a transfer stage 60 for transferring the workpiece 44; and a controller 70 for controlling the movement of the transfer stage 60. The controller 70 controls the laser irradiation device 50 so that the laser beam is emitted with a constant power and also controls the driving of the transfer stage 60 in the manner that the workpiece 44 is transferred with a uniform speed.
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TOKURA FUMIHIKO
NOMURA NOBUNAO
