Title:
層状部材の製造方法、及び層状部材
Document Type and Number:
Japanese Patent JP4762891
Kind Code:
B2
Abstract:
The object is to provide a photoelectric surface member which allows higher quantum efficiency. In order to achieve this object, a photoelectric surface member 1a is a crystalline layer formed by a nitride type semiconductor material, and comprises a nitride semiconductor crystal layer 10 where the direction from the first surface 101 to the second surface 102 is the negative c polar direction of the crystal, an adhesive layer 12 formed along the first surface 101 of the nitride semiconductor crystal layer 10, and a glass substrate 14 which is adhesively fixed to the adhesive layer 12 such that the adhesive layer 12 is located between the glass substrate 14 and the nitride semiconductor crystal layer 10.
Inventors:
Tokuaki Futahashi
Masato Sumiya
Minoru Hagino
Fukuya Toshiro
Masato Sumiya
Minoru Hagino
Fukuya Toshiro
Application Number:
JP2006510930A
Publication Date:
August 31, 2011
Filing Date:
March 07, 2005
Export Citation:
Assignee:
Hamamatsu Photonics Co., Ltd.
International Classes:
H01J9/12; C23C16/01; C30B29/38; C30B29/40; H01J1/34; H01J40/06; H01L21/205
Domestic Patent References:
| JP2002348199A | 2002-12-04 | |||
| JP2000011856A | 2000-01-14 | |||
| JP2002075871A | 2002-03-15 | |||
| JP2002241198A | 2002-08-28 | |||
| JPH0896705A | 1996-04-12 | |||
| JPH1168157A | 1999-03-09 |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Shiro Terasaki
Satoru Ishida
Toru Kamada
Shiro Terasaki
Satoru Ishida
Toru Kamada