Title:
MANUFACTURING METHOD OF LINE CONDUCTOR
Document Type and Number:
Japanese Patent JP2013169001
Kind Code:
A
Abstract:
To provide a manufacturing method of a line conductor which improves energy propagation efficiency in the line conductor.
A manufacturing method of a line conductor includes the steps of: forming a first resist 33 on a substrate 31; forming a recessed part in the first resist 33 and forming a foot 34 extending an inward direction of the recessed part at a root part of the recessed part that is located close to the substrate; and embedding a conductive material 35 in the recessed part. Further, the manufacturing method includes the step of performing physical etching or chemical etching to the conductive material thereby creating roundness of a corner at the side, at which the foot is not formed, in the conductive material.
Inventors:
TOYODA OSAMU
XIAOYU MI
UEDA TOMOSHI
XIAOYU MI
UEDA TOMOSHI
Application Number:
JP2013096874A
Publication Date:
August 29, 2013
Filing Date:
May 02, 2013
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
H01P3/08; H01P11/00; H05K3/10; H05K3/28
Domestic Patent References:
| JPH0462920A | 1992-02-27 | |||
| JP2005229041A | 2005-08-25 | |||
| JPH04251915A | 1992-09-08 | |||
| JP2007173826A | 2007-07-05 | |||
| JPH09246811A | 1997-09-19 |
Attorney, Agent or Firm:
Yukio Kubo
Yasuhiro Sakata
Yasuhiro Sakata