Title:
Manufacturing method of liquid discharge head
Document Type and Number:
Japanese Patent JP6333016
Kind Code:
B2
Abstract:
A manufacturing method for a liquid ejection head including: a substrate; an ejection orifice forming member having an ejection orifice on the substrate; and a surface layer having a recess that has a bottom portion communicating with the ejection orifice and an opening held in contact with an outside and having a width larger than a width of the ejection orifice, the surface layer being formed on the forming member, the method including: forming a first resin layer serving as the forming member by applying a negative photosensitive resin composition A onto the substrate; forming a second resin layer as the surface layer by applying a negative photosensitive resin composition B having sensitivity lower than sensitivity of the composition A onto the first resin layer; subjecting the first and the second resin layers to pattern exposure collectively; and subjecting the first and the second resin layers to development collectively.
Inventors:
Ishii Miho
Ken Ikegame
Ken Ikegame
Application Number:
JP2014068276A
Publication Date:
May 30, 2018
Filing Date:
March 28, 2014
Export Citation:
Assignee:
Canon Inc
International Classes:
B41J2/16; B41J2/14
Domestic Patent References:
| JP2013256014A | ||||
| JP2008030272A | ||||
| JP2007518588A |
Foreign References:
| US20080062235 |
Attorney, Agent or Firm:
Akio Miyazaki
Masaaki Ogata
Masaaki Ogata
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