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Patent Searching and Data


Title:
MANUFACTURING METHOD FOR LIQUID JET HEAD
Document Type and Number:
Japanese Patent JP2004188939
Kind Code:
A
Abstract:

To provide a manufacturing method for a liquid jet head capable of preventing defective ejection such as clogging in a nozzle.

This liquid jet head comprises a fluid passage forming substrate 10 having a pressure generating chamber 12 communicating with a nozzle opening formed thereon, and a piezoelectric element 300 which consists of a lower electrode 60, a piezoelectric body layer 70, and an upper electrode 80, and is provided on one face side of the fluid passage forming substrate 10 with a diaphragm therebetween. This method of manufacturing the liquid jet head comprises a process for forming the diaphragm and the piezoelectric element 300 on one face side of the fluid passage substrate 10, a process for forming the pressure generating chamber 12 by patterning the fluid passage forming substrate 10 from the other face side and forming a communication section communicating with one end of the pressure generating chamber 12 in the longitudinal direction, and a process for forming a through-hole section 110 for supplying a liquid to the communication section 13 by radiating a laser light 130 to a region of the diaphragm opposite to the communication section 13 in a condition that an air flow 120 is generated along an opening face where a region of the diaphragm in an assembly having at least the fluid passage forming substrate 10 opposite to the communication section 13 is opened.


Inventors:
FURUHATA YUTAKA
Application Number:
JP2002363006A
Publication Date:
July 08, 2004
Filing Date:
December 13, 2002
Export Citation:
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Assignee:
SEIKO EPSON CORP
International Classes:
B41J2/16; B41J2/045; B41J2/055; (IPC1-7): B41J2/16; B41J2/045; B41J2/055
Attorney, Agent or Firm:
Hiroyuki Kurihara