To provide an excellent probe carrier manufacturing method in which a different probe material is precluded from being mixed in the respective probe materials arranged on a probe carrier substrate, and in which purity of the each arranged probe material is high.

In this probe carrier manufacturing method wherein a plurality of kinds of probe solutions corresponding respectively to a plurality of kinds of probes is delivered on the substrate from a liquid delivery part having a liquid delivery port face of which the plurality of liquid delivery ports is opened in a two-dimensional array of m lines and n rows, so as to arrange the plurality of kinds of probes on the substrate, a process is provided to wipe out the liquid delivery port face, using a wiping-out part. In the wiping-out process, a portion of the wiping-out part passing through on the liquid delivery port conducts the wiping-out along a direction not passed through on the other liquid delivery port.