Title:
膜及び液体吐出ヘッドの製造方法
Document Type and Number:
Japanese Patent JP7019400
Kind Code:
B2
Abstract:
A method of producing a film including repeating a cycle comprised of an application step, a coat removal step and a sintering step N times (N≥2), wherein relative to a liquid supply position in the (n)th (1≤n≤N−1) cycle coat removal step, a liquid supply position in the (n+1)th cycle coat removal step is the same or shifted in a direction approaching the center of a substrate for all n(s) and at the same time, shifted in a direction approaching the center of the substrate for at least one of the (n)s; or is the same or shifted in a direction away from the center of the substrate for all n(s) and at the same time, shifted in a direction away from the center of the substrate for at least one of the (n)s.
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Inventors:
Masanori Sato
Application Number:
JP2017240794A
Publication Date:
February 15, 2022
Filing Date:
December 15, 2017
Export Citation:
Assignee:
Canon Inc
International Classes:
B41J2/16; B41J2/14
Domestic Patent References:
| JP2016058694A | ||||
| JP2008016586A | ||||
| JP2011014714A |
Attorney, Agent or Firm:
Akio Miyazaki
Masaaki Ogata
Masaaki Ogata