Title:
MANUFACTURING METHOD FOR MEMS VIBRATING ELEMENT AND MES VIBRATING ELEMENT
Document Type and Number:
Japanese Patent JP2019033630
Kind Code:
A
Abstract:
To provide a manufacturing method capable of facilitating formation of a MEMS vibrating element corresponding to various environmental vibrations.SOLUTION: The manufacturing method for MEMS vibrating element having a stationary electrode 3, a movable electrode 4, and an elastic support part 5 elastically supporting the movable electrode 4 on the stationary electrode 3, includes: etching a device layer 102 with a first thickness t1 to form a stationary electrode 3 and a movable electrode 4; and etching the device layer 102 to a form the elastic support part 5 to have a second thickness t2 smaller than the first thickness t1.SELECTED DRAWING: Figure 2
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Inventors:
HASHIGUCHI GEN
KOGA HIDEAKI
KOGA HIDEAKI
Application Number:
JP2017154474A
Publication Date:
February 28, 2019
Filing Date:
August 09, 2017
Export Citation:
Assignee:
UNIV SHIZUOKA NAT UNIV CORP
SAGINOMIYA SEISAKUSHO INC
SAGINOMIYA SEISAKUSHO INC
International Classes:
H02N11/00; B81B3/00; B81C1/00; H01G5/013; H01G7/02
Domestic Patent References:
| JP2009171394A | 2009-07-30 | |||
| JP2016082836A | 2016-05-16 | |||
| JP2013013256A | 2013-01-17 | |||
| JP2006005731A | 2006-01-05 |
Foreign References:
| WO2014034602A1 | 2014-03-06 | |||
| WO2017057317A1 | 2017-04-06 |
Attorney, Agent or Firm:
Fuyuki Nagai
Keiichi Ikeda
Keiichi Ikeda