To provide a manufacturing method of metal grids capable of further finely forming metal parts of a grid using a silicone (Si) substrate by an electroforming, and to provide the metal grid and an X-ray radiographic apparatus using the same.
A metal grid DG according to the present invention includes a first Si part 11, a second Si part 12a formed thereon, and a grid 12 formed by alternately disposing metal parts 12b in parallel to each other. The second Si part 12a has a first insulating layer 12c between itself and the metal part 12b, and a second insulating layer 12d at the apex. The metal grid DG is manufactured by forming a resist layer on a silicone substrate; patterning and removing the resist layer by a lithography method; etching the removed portion to a predetermined depth H by a dry etching method to form a recess (for example, a slit groove); forming the insulating layer on the inner surface of the recess by an anodic oxidation method; removing the insulating layer at the bottom of the recess; and filling the recess with the metal by the electroforming.
Masataka Otani
Satoshi Sakurai
Next Patent: LIGHT QUANTITY ADJUSTING DEVICE