Title:
微細加工体の製造方法、およびエッチング装置
Document Type and Number:
Japanese Patent JP4596072
Kind Code:
B2
Inventors:
Endo Soumei
Kazuya Hayashibe
Koichiro Shimizu
Kazuya Hayashibe
Koichiro Shimizu
Application Number:
JP2008335102A
Publication Date:
December 08, 2010
Filing Date:
December 26, 2008
Export Citation:
Assignee:
ソニー株式会社
International Classes:
G02F1/1335; B29C33/38; B29C33/42; G02B1/02; G02B1/11; G02B1/118; B29L11/00
Domestic Patent References:
| JP11121901A | ||||
| JP2001023972A | ||||
| JP2008304637A | ||||
| JP2000121802A | ||||
| JP2008256838A | ||||
| JP2008226340A |
Attorney, Agent or Firm:
Masatomo Sugiura