Title:
モノリシックマイクロ波集積回路の製造方法
Document Type and Number:
Japanese Patent JP3975574
Kind Code:
B2
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Inventors:
Koichi Hoshino
Application Number:
JP25520198A
Publication Date:
September 12, 2007
Filing Date:
September 09, 1998
Export Citation:
Assignee:
株式会社デンソー
International Classes:
H01H59/00; H01L21/3205; B62D57/00; B81B5/00; B81C1/00; H01L23/52
Domestic Patent References:
JP8506690A | ||||
JP8213803A | ||||
JP9213191A |
Foreign References:
EP0849820B1 | ||||
US3796976 |
Attorney, Agent or Firm:
Tsuyoshi Sato