To provide a manufacturing method of a multilayer ceramic substrate capable of forming a function material layer that is partially formed along the specific interface between ceramic layers for substrates and includes a function material differing from the ceramic layer for substrates with high position precision.
A function material green sheet is formed on a carrier film 14. A scission section in a shape corresponding to the contour of the function material layer 8 is formed by irradiating laser beams in the function material green sheet. The remainder of the function material green sheet positioned outside the scission section is removed from the carrier film 14 by separation. After that, the function material layer 8 is transferred onto the ceramic green sheet 12 for a specific substrate from the carrier film 14 in a state being positioned by the carrier film 14. A plurality of ceramic green sheets 12 for substrates including the ceramic green sheet 12 for the substrate are laminated for obtaining a raw laminate. Then, the raw laminate is burned for obtaining the multilayer ceramic substrate.
FUKUDA HIROSHI
KAWAKAMI KENJI
NISHIDE MITSUYOSHI
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