To provide a manufacturing method for a nano structure carbon material capable of forming nano structure carbon materials such as carbon nano fiber, graphite nano fiber, on a substrate uniformly and with good yield at a low temperature.

The manufacturing method for the nano structure carbon material comprises a process in which a solution of a metal compound is coated on the substrate, a process in which a metal oxide minute particle is imparted to the substrate by drying and then by decomposing and removing the other components than the metal components in the metal compound by a plasma treatment, and a process in which the nano structure carbon material is formed on the substrate.