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Patent Searching and Data


Title:
MANUFACTURING METHOD OF NANOSTRUCTURE AND NANOSTRUCTURE
Document Type and Number:
Japanese Patent JP2004314238
Kind Code:
A
Abstract:

To provide a manufacturing method of a nanostructure which improves a function of a structural pattern of wiring, etc. higher under a simple method.

In a manufacturing method of a nanostructure using nano imprinting method, a pattern formed layer 12 is provided on a base body 13 by dispersing more than one kind of particulates 18 on a matrix 19 with resin as a main component or alternately laminating and forming more than two layers of more than one kind of the particulate layer and more than one layer with more than one kind of resin as a main component, stamper 11 on which a pattern of irregular structure is formed is pressed on the base body 13 on an upper part of which the pattern formed layer 12 is provided so as to face against it, and the irregular structure pattern of the stamper 11 is transferred on the pattern formed layer 12. More than one kind of the particulates 18 are made of a metallic material.


Inventors:
KONAKAHARA KAORU
DEN TORU
Application Number:
JP2003111705A
Publication Date:
November 11, 2004
Filing Date:
April 16, 2003
Export Citation:
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Assignee:
CANON KK
International Classes:
B82B3/00; H01L21/3205; (IPC1-7): B82B3/00; H01L21/3205
Attorney, Agent or Firm:
Jyohei Yamashita
Hiroshi Shimura