To provide a manufacturing method for an optical disk master plate which employs a method for heat treatment making it possible to form a stable macromolecular material layer free of the peeling of a pattern in electroforming.
This manufacturing method for the original optical disk master plate comprises a process of forming a hydrophilic high polymer material layer 2 which is not mixed with photoresist on a glass substrate 1, a process of carrying out heat treatment at 100 to 120°C and then at 160 to 240°C, a process of forming a photoresist layer 3, a process of forming a pattern by exposing the photoresist layer 3 to a laser beam 4, a process of forming a pattern on the macromolecular material layer 2 by irradiating it with ultraviolet rays (UV) light) through the mentioned pattern as a mask, a process of peeling the photoresist layer 3 used as the mask, and a process of electroforming the pattern surface and peeling the glass substrate 1 to obtain a stamper 9. High- temperature heat treatment after the peeling of the photoresist layer can be omitted and the pattern shape of pits and guide grooves on the photoresist layer 3 is not impaired.