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Title:
MANUFACTURING METHOD OF OPTICAL MICROSCANNER, OPTICAL MICROSCANNER AND OPTICAL MICROSCANNER ARRAY
Document Type and Number:
Japanese Patent JP2003075744
Kind Code:
A
Abstract:

To provide a manufacturing method of an optical microscanner in which minute and highly dense scanners are easily made into an array and to provide an optical microscanner and an optical microscanner array.

Coating electrodeposition electrodes 6 by electrodeposition electrode patterns 1 and mirror driving sections 3 by mirror driving patterns 2 are formed on a transparent substrate 6. Then, mask sections 4 are laminated and etching is conducted to form opening sections 5 for the electrodes 6. Then, electrodeposition is conducted in a second step to form mirror sections 7. Then, the sections 4 are eliminated in a third step. By conducting the above, an optical microscanner array, in which the region on the substrate is effectively used, is formed as indicated in (d) of Figure 1.


Inventors:
Ogaki, Takashi
Application Number:
JP2001000269259
Publication Date:
March 12, 2003
Filing Date:
September 05, 2001
Export Citation:
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Assignee:
RICOH CO LTD
International Classes:
G02B26/08; B81B3/00; B81C1/00; G02B26/10; (IPC1-7): G02B26/08; B81B3/00; B81C1/00; G02B26/10
Attorney, Agent or Firm:
伊東 忠彦