Title:
有機絶縁膜の製造方法及びインクジェットヘッド
Document Type and Number:
Japanese Patent JP4223247
Kind Code:
B2
Abstract:
An organic insulating coating formed on a substrate is composed of two layers of a first parylene coating and a second parylene coating. Heat treatment is performed to at least the first parylene coating after being formed, at a temperature below 125° C. for two hours. Then the second parylene coating is formed on the first parylene coating. Occurrence of pinholes is thus prevented at least in one of the two layers of the organic coatings, with the result that insulating properties of the coatings are improved.
Inventors:
Deguchi Haruhiko
Shigemitsu Kakiwaki
Koji Matoba
Hirokazu Nakamura
Matsushita Masaki
Satoru Tanaka
Shigemitsu Kakiwaki
Koji Matoba
Hirokazu Nakamura
Matsushita Masaki
Satoru Tanaka
Application Number:
JP2002234772A
Publication Date:
February 12, 2009
Filing Date:
August 12, 2002
Export Citation:
Assignee:
Sharp Corporation
International Classes:
B41J2/16; B05D3/02; B05D5/12; B41J2/045; B41J2/055
Domestic Patent References:
| JP2001326222A | ||||
| JP11111456A | ||||
| JP2000071451A |
Attorney, Agent or Firm:
Hisao Komori
Toshio Ozawa
Toshio Ozawa