To provide a method for forming electrodes with a prescribed pattern to at least a side face of a vibrator and forming an electrode pattern with high accuracy even when the vibrator is downsized.
A substrate 1 for the vibrator is prepared. The substrate 1 has a pair of principal faces 1a, 1b, and side faces 1c, 1d. A conductive film 3 is formed to at least the side faces 1c, 1d of the substrate 1. Then a resist film 4A is formed on the conductive film 3. Masks 8A, 8B each having an opening 8a are placed on the principal faces 1a, 1b. The resist film 4 on the side faces 1c, 1d is exposed from the opening 8a to apply patterning to the resist film 4. Etching the conductive film 3 on the side faces 1c, 1d corresponding to the exposure pattern of the resist film 4 forms the electrodes.
COPYRIGHT: (C)2004,JPO&NCIPI
Takayuki Kikuchi
JP58146117A | ||||
JP57015520A | ||||
JP57173217A | ||||
JP60074332U | ||||
JP3110912A | ||||
JP3255693A | ||||
JP5308238A | ||||
JP54160151A |
Juno Aoki