Title:
MANUFACTURING METHOD OF PASSIVATION FILM AND ORGANIC EL ELEMENT
Document Type and Number:
Japanese Patent JP2007234312
Kind Code:
A
Abstract:
To provide a lift-off method without chemically separating a resist pattern.
This manufacturing method of a patterned passivation film for preventing deterioration of an organic EL element caused by permeation of moisture from an ambient environment includes processes of: forming a patterned film for lift-off on the organic EL element; forming the passivation film after that; and separating the film for lift-off along with a part of the passivation film present on top of it.
COPYRIGHT: (C)2007,JPO&INPIT
Inventors:
OGINO SHINJI
Application Number:
JP2006052491A
Publication Date:
September 13, 2007
Filing Date:
February 28, 2006
Export Citation:
Assignee:
FUJI ELECTRIC HOLDINGS
International Classes:
H05B33/04; H01L51/50; H05B33/10
Attorney, Agent or Firm:
Shoichi Okuyama
Arihara Koichi
Matsushima Tetsuo
Hidefumi Kawamura
Masayuki Okamoto
Arihara Koichi
Matsushima Tetsuo
Hidefumi Kawamura
Masayuki Okamoto