ペリクル、露光原版、露光装置、及び半導体装置の製造方法

Title:

ペリクル、露光原版、露光装置、及び半導体装置の製造方法

Document Type and Number:

Japanese Patent JP6968259

Kind Code:

B2

Abstract:

To provide a pellicle in which outgas from an adhesive layer is suppressed. The pellicle (100) comprises a pellicle film (101), a support frame (103) for supporting the pellicle film, a protrusion part (105) arranged in the support frame, a first adhesive layer (107) arranged on the protrusion part; and an inorganic material layer arranged at a position closer to the pellicle film than the first adhesive layer. The inorganic material layer may include a first inorganic material layer (109) arranged at a first side surface (121) of the first adhesive layer, the first side surface of the first adhesive layer intersecting the pellicle film, and arranged at a position closer to the pellicle film.

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Inventors:

Yousuke Ono
Kazuo Takamura
Atsushi Okubo
Hiroki Ichi
Ishikawa Hisako
Tsuneaki Mitanijima

Application Number:

JP2020504994A

Publication Date:

November 17, 2021

Filing Date:

March 01, 2019

Export Citation:

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Assignee:

Mitsui Chemicals, Inc.

International Classes:

G03F1/64; G03F1/22; G03F7/20

Domestic Patent References:

JP5232690A
JP2003222990A
JP5341502A

Foreign References:

WO1999049366A1
WO2016043301A1
US5422704

Attorney, Agent or Firm:

Takahashi Hayashi & Partners

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