Title:
感光性樹脂組成物、感光性エレメント、レジストパターンの製造方法及びプリント配線板の製造方法
Document Type and Number:
Japanese Patent JP6620747
Kind Code:
B2
Inventors:
Kazumasa Takeuchi
Shota Okade
Shota Okade
Application Number:
JP2016538346A
Publication Date:
December 18, 2019
Filing Date:
July 27, 2015
Export Citation:
Assignee:
Hitachi Chemical Co., Ltd.
International Classes:
G03F7/033; C08F293/00; G03F7/004; G03F7/20; H05K3/06; H05K3/18
Domestic Patent References:
| JP2008216489A | ||||
| JP2008250273A | ||||
| JP2008024915A |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshinori Shimizu
Hiroyuki Hirano
Tomoya Furoshita
Yoshinori Shimizu
Hiroyuki Hirano
Tomoya Furoshita