Title:
MANUFACTURING METHOD FOR PIEZOELECTRIC ACTUATOR, PIEZOELECTRIC ACTUATOR, LIQUID JET HEAD, AND LIQUID JET APPARATUS
Document Type and Number:
Japanese Patent JP2006224348
Kind Code:
A
Abstract:
To provide a manufacturing method for a piezoelectric actuator which has excellent piezoelectric characteristics and which enhances the property of close contact between a piezoelectric body layer and an upper electrode, and the piezoelectric actuator.
This manufacturing method for the piezoelectric actuator comprises: a step of forming an elastic film 25 on a substrate 10; a step of forming a lower electrode 13 on the elastic film 25, a step of forming a piezoelectric body film 14 on the lower electrode 13; a step of forming an upper-electrode forming film 15 by implanting an ion onto a part of the film 14; and a step of forming the piezoelectric body layer 16 and the upper electrode 17 by patterning the films 14 and 15.
Inventors:
TSUDA AKIHITO
Application Number:
JP2005038365A
Publication Date:
August 31, 2006
Filing Date:
February 15, 2005
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
B41J2/16; B41J2/045; B41J2/055; B41J2/135; B41J2/14; H01L41/08; H01L41/09; H01L41/18; H01L41/187; H01L41/22; H01L41/29; H02N2/00
Attorney, Agent or Firm:
Yoshiyuki Inaba
Katsuro Tanaka
Shinji Oga
Katsuro Tanaka
Shinji Oga