Title:
圧電基板、圧電振動素子、圧電振動子、圧電発振器、圧電基板ウェハ及び圧電基板ウェハの製造方法
Document Type and Number:
Japanese Patent JP4752863
Kind Code:
B2
Inventors:
Koichi Iwata
Application Number:
JP2008114041A
Publication Date:
August 17, 2011
Filing Date:
April 24, 2008
Export Citation:
Assignee:
Epson Toyocom Corporation
International Classes:
H03H9/19; H03B5/32; H03H3/02
Domestic Patent References:
| JP8172315A | ||||
| JP9199977A | ||||
| JP10256867A | ||||
| JP6334461A | ||||
| JP2002204140A | ||||
| JP2001185954A | ||||
| JP2002246873A | ||||
| JP2000312130A |
Attorney, Agent or Firm:
Hitoshi Suzuki